Bruker delivers cutting-edge metrology solutions for the challenging demands of the semiconductor industry. Advanced automation systems and rapid, non-contact analysis tools facilitate applied materials research and process control in semiconductor manufacturing.
Discover a comprehensive spectrum of solutions ranging from x-ray technology, AFM, and Stylus Profiling to Nano-Indentation, WLI, Ellipsometry, and nanoscale IR spectroscopy.
Applications include critical dimension metrology, the nanoscale characterization of electrical, mechanical, and chemical properties, failure analysis and defect detection in wafer production, post-CMP and post-etch processes, and C-S thin films and multi-layer thin film characterization.
For more information, visit www.bruker.com/nano
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Webpage link: www.Bruker.com/Nano
